AGC is leader in High Purity Silicon Carbide Components
A full line of high-purity re-crystallized & CVD-Coated SiC furnace components for Vertical, Horizontal and Single Wafer processes, it is preferred worldwide by furnace manufacturers and wafer fabs whose processes demand the use of high-purity precision components.
With less than ppb purity levels and a melting point of > 1400(deg), CVD-Coated SiC is the material of choice for high-temperature and LP-CVD processes. CVD-Coated SiC is virtually impervious to acid etc, resulting in consistent and repeatable performance time after time.
Those materials are available in 150mm – 300mm for all major horizontal and vertical systems.


Silicon Carbide


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