Cyberoptics

Speed your semiconductor processes with WaferSense and ReticleSense measurement devices.

When you need the most efficient and effective measurement devices for semiconductor tool set-up and maintenance processes, count on CyberOptics, the global market leader in wireless semiconductor measurement devices for chamber gapping, leveling, wafer handoff teaching, vibration, airborne particle, relative humidity and resistance measurement.

Save Time & Expense

  • Improve yields and increase tool uptime
  • Increase throughput
  • Reduce resource needs
  • Speed equipment set-up, maintenance cycles, trouble-shooting, qualification and release to production
  • Speed tool optimization, stabilization and standardization
  • Streamline fab processes
  • Establish repeatable and verifiable standards
ReticleSense® Auto Multi Sensor™ (AMSR)
Speed vibration, leveling and humidity measurements with all-in-one measurement device. Improve yields.
Click Here
WaferSense® Airborne Particle Sensor™
Improve equipment set-up and long-term yields by wirelessly monitoring airborne particles in real-time. Thinner. Lighter. Precision Accuracy.
Click Here
WaferSense® Auto Resistance Sensor™ (ARS)
Real time resistance measurement of plating cell contacts.
Click Here
WaferSense® Auto Multi Sensor™
Speed vibration, leveling and humidity measurements with all-in-one measurement device. Improve yields.
Click Here
WaferSense® Auto Vibration and Leveling Sensor™ (AVLS)
Speed simultaneous vibration and leveling measurements.
Click Here
In-line Particle Sensor™ (IPS™)
24/7 detection of small particles in gas and vacuum lines.
Click Here
Previous
Next
Introducing Cyberoptics new website: