Cyberoptics

Speed your semiconductor processes with WaferSense and ReticleSense measurement devices.

When you need the most efficient and effective measurement devices for semiconductor tool set-up and maintenance processes, count on CyberOptics, the global market leader in wireless semiconductor measurement devices for chamber gapping, leveling, wafer handoff teaching, vibration, airborne particle, relative humidity and resistance measurement.

Save Time & Expense

  • Improve yields and increase tool uptime
  • Increase throughput
  • Reduce resource needs
  • Speed equipment set-up, maintenance cycles, trouble-shooting, qualification and release to production
  • Speed tool optimization, stabilization and standardization
  • Streamline fab processes
  • Establish repeatable and verifiable standards
AMSR
AMSR
APS
APS
ARS
ARS
AMS
AMS
ALVS
ALVS
IPS
IPS
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ReticleSense® Auto Multi Sensor™ (AMSR)
Speed vibration, leveling and humidity measurements with all-in-one measurement device. Improve yields.
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WaferSense® Airborne Particle Sensor™
Improve equipment set-up and long-term yields by wirelessly monitoring airborne particles in real-time. Thinner. Lighter. Precision Accuracy.
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WaferSense® Auto Resistance Sensor™ (ARS)
Real time resistance measurement of plating cell contacts.
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WaferSense® Auto Multi Sensor™
Speed vibration, leveling and humidity measurements with all-in-one measurement device. Improve yields.
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WaferSense® Auto Vibration and Leveling Sensor™ (AVLS)
Speed simultaneous vibration and leveling measurements.
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In-line Particle Sensor™ (IPS™)
24/7 detection of small particles in gas and vacuum lines.
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Introducing Cyberoptics new website:
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